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ABOUT RTP

Advantages of Real RTP

Advantages of Real RTP

RTP(Rapid thermal process) overview

Thermal treatment process system for rapid substrate heating with halogen lamp

RTP
RTP

We have developed a new technology called Real TC KIT, overcoming the limitations of using technology.

The development of Real TC(Temperature Control) KIT technology to manage control temperature and actual substrate temperature precisely and equally.

Advantages

Real TC KIT equipped Real RTP.

Advantages

The operational principle of Real TC KIT

Advantages

Extremely high precision is required to accurately and reliably temperature of the sample

Advantages

Deviation at the typically RTP by the environment & the situation → compensation is needed
  • Real RTP is real-time non-contact and non-optical substrate temperature reading technology with direct and indirect methods to solve problems of existing direct/indirect temperature measurement methods.
  • When heat raises the substrate's temperature while keeping a particular gap between the rotating process substrate and a piece of thermocouple attached substrate which is applied with the same material of the substrate, the piece of thermocouple attached substrate will be heated concurrently. The temperature of the piece of thermocouple attached substrate can be measured directly using the thermocouple, which enables the real-time non-contact and non-optical temperature measurement method to read the temperature of the process substrate.
  • The operational principle of Real TC KIT for real-time non-contact and non-optical substrate temperature reading.

    A substrate and Real TC KIT for real-time non-contact and non-optical substrate temperature reading are heated at the same time by radiant energy from halogen lamp in rapid thermal treatment equipment which is equipped with Real TC KIT for real-time non-contact and non-optical substrate temperature reading.

    • 1) Radiant energy is released from the heated substrate.
    • 2) Real TC KIT for real-time non-contact and non-optical substrate temperature reading is heated more by the radiant energy.
    • 3) Radiant energy is released from the heated Real TC KIT for real-time non-contact and non-optical substrate temperature reading.
    • 4) Heat is added to the substrate by the radiant energy.

    Repeating of 1)~4) reduces deviation in temperatures between the substrate and Real TC KIT for real-time non-contact and non-optical substrate temperature reading.