ABOUT RTP
Technology innovation with advanced Technology create the future
About RTP
RTP(Rapid thermal process) overview
Thermal treatment process system for rapid substrate heating with halogen lamp
Limitations of Existing Technology → Needs of New Technology
Drawbacks of thermal control with thermocouple for non-contact temperature reading.
Temperature deviation occurs by different thermal properties between a substrate and the thermocouple for temperature reading & controlling.
Issues of thermal control with a pyrometer for optical temperature reading.
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