Technology innovation with advanced Technology create the future
RTP(Rapid thermal process) overview
Thermal treatment process system for rapid substrate heating with halogen lamp
Real substrate temperature
Accurate temperature control
Unnecessary compensation
High reliability
Low cost
We have developed a new technology called Real TC KIT, overcoming the limitations of using technology.
The development of Real TC(Temperature Control) KIT technology to manage control temperature and actual substrate temperature precisely and equally.
A substrate and Real TC KIT for real-time non-contact and non-optical substrate temperature reading are heated at the same time by radiant energy from halogen lamp in rapid thermal treatment equipment which is equipped with Real TC KIT for real-time non-contact and non-optical substrate temperature reading.
Repeating of 1)~4) reduces deviation in temperatures between the substrate and Real TC KIT for real-time non-contact and non-optical substrate temperature reading.